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thermal actuation

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1No 1Yes

1thermal position sensing 1thermal postion sensing

1Bazaei, A. 1Bazaei, Ali 1Moheimani, S. O. R. 1Moheimani, S. O. Reza 1Yuce, M. R. 1Yuce, Mehmet Rasit 1Zhu, Y. 1Zhu, Yong

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12010 12011

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Full Text

1No 1Yes

1thermal position sensing 1thermal postion sensing

1Bazaei, A. 1Bazaei, Ali 1Moheimani, S. O. R. 1Moheimani, S. O. Reza 1Yuce, M. R. 1Yuce, Mehmet Rasit 1Zhu, Y. 1Zhu, Yong

Date

12010 12011

1Adobe Acrobat PDF

Title
Creator
Date

Design, modeling, and control of a micromachined nanopositioner with integrated electrothermal actuation and sensing

- Zhu, Yong, Bazaei, Ali, Moheimani, S. O. Reza, Yuce, Mehmet Rasit

Creator: Zhu, Yong , Bazaei, Ali , Moheimani, S. O. Reza , Yuce, Mehmet Rasit
Resource Type: journal article
Date: 2011

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A micromachined nanopositioner with on-chip electrothermal actuation and sensing

- Zhu, Y., Bazaei, A., Moheimani, S. O. R., Yuce, M. R.

Creator: Zhu, Y. , Bazaei, A. , Moheimani, S. O. R. , Yuce, M. R.
Resource Type: journal article
Date: 2010

A micromachined nanopositioner with on-chip electrothermal actuation and sensing

Creator: Zhu, Y. , Bazaei, A. , Moheimani, S. O. R. , Yuce, M. R.
Resource Type: journal article
Date: 2010

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